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Inventors
Hohyoung Lee
Yuseong-gu
KR
1 patent
2 Patents
US12087549
2024
Demagnetizing Coils for Linearity Improvement of Current Ratio of Plasma Processing Systems
MKS Instruments, Inc.
0 cites
US11823869
2023
Impedance Matching in a RF Power Generation System
MKS Instruments, Inc.
0 cites