Patents/Inventors

Hitoshi Murata

ToyamaJP4 patents

4 Patents

US125043322025
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
US122939302025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater
Kokusai Electric Corporation
0 cites
US122411592025
Substrate Processing Apparatus and Ceiling Heater
Kokusai Electric Corporation
0 cites
US119063672024
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites