Hisajiro Nakano

4 Patents

• US125326942026

  Substrate Cleaning Device and Substrate Processing Device

  EBARA CORPORATION

  0 cites
• US119488272024

  Substrate Support Mechanism, Substrate Cleaning Device and Substrate Processing Method

  EBARA CORPORATION

  0 cites
• US116642522023

  Cleaning Device, Polishing Device, and Device and Method for Calculating Rotation Speed of Substrate in Cleaning Device

  EBARA CORPORATION

  0 cites
• US116262992023

  Cover for Swing Member of Substrate Processing Apparatus, Swing Member of Substrate Processing Apparatus, and Substrate Processing Apparatus

  EBARA CORPORATION

  0 cites