Patents/Inventors

Hiroyuki Yokohara

NirasakiJP2 patents

3 Patents

US120778482024
Vacuum Processing Apparatus
Tokyo Electron Limited
0 cites
US116055472023
Temperature Measuring Mechanism, Temperature Measuring Method, and Stage Device
TOKYO ELECTRON LIMITED
0 cites
US115519182023
Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites