Patents/Inventors

Hiroyuki Toshima

YamanashiJP6 patents

7 Patents

US120273532024
Substrate Processing Method and Apparatus
Tokyo Electron Limited
0 cites
US120149112024
Sputtering Apparatus
Tokyo Electron Limited
0 cites
US118517502023
Apparatus and Method for Performing Sputtering Process
Tokyo Electron Limited
0 cites
US117421902023
Sputtering Apparatus and Film Forming Method
Tokyo Electron Limited
0 cites
US117053152023
Sputtering Apparatus and Sputtering Method
TOKYO ELECTRON LIMITED
0 cites
US116642072023
Film-forming Apparatus, Film-forming System, and Film-forming Method
TOKYO ELECTRON LIMITED
0 cites
US115519302023
Methods to Reshape Spacer Profiles in Self-aligned Multiple Patterning
Tokyo Electron Limited
0 cites