24 Patents
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- US125105852025Test Device and Temperature Control Method with Temperature Sensors
Tokyo Electron Limited
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- US123856982025Solid Heat Storage Material Adjusted in Thermal Conductivity and Composite Including the Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
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- US118743192024Inspection Apparatus and Control Method for Inspection Apparatus
Tokyo Electron Limited
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- US118108002023Substrate Support, Test Device, and Method of Adjusting Temperature of Substrate Support
Tokyo Electron Limited
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- US117033742023Onboard System, Charging System, Charging Method, and Program
MITSUBISHI HEAVY INDUSTRIES MACHINERY SYSTEMS, Ltd.
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