Patents/Inventors

Hiroyuki Miyashita

YamanashiJP5 patents

6 Patents

US126092852026
Semiconductor Manufacturing Apparatus and Manufacturing Method for Semiconductor Device
TOKYO ELECTRON LIMITED
0 cites
US124826372025
Plasma Source and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US124630132025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US122057992025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US117495112023
Plasma Observation System and Plasma Observation Method
TOKYO ELECTRON LIMITED
0 cites
US115695582023
Directional Coupler for Use in a Substrate Processing Apparatus, Where the Directional Coupler Includes a Coaxial Line Coupled to a Conductor on a Substrate
TOKYO ELECTRON LIMITED
0 cites