4 Patents
- US124476682025Imprint Device, Imprint Method, Article Manufacturing Method, and Storage Medium
CANON KABUSHIKI KAISHA
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- US118290832023Detection Apparatus, Lithography Apparatus, Article Manufacturing Method, and Detection Method
CANON KABUSHIKI KAISHA
0 cites - US117911482023Variable Reduction Ratio Spherical Aberration Correction Electrostatic Lens, Wide Angle Energy Analyzer, and Two-dimensional Electron Spectrometer
University Corporation National Nara Institute Of Science And Technology
0 cites