Patents/Inventors

Hiroyuki Iwaki

TokyoJP3 patents

3 Patents

US125911802026
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117034592023
System and Method to Calibrate a Plurality of Wafer Inspection System (WIS) Modules
Tokyo Electron Limited
0 cites
US116370312023
Systems and Methods for Spin Process Video Analysis During Substrate Processing
Tokyo Electron Limited
0 cites