Patents/Inventors

Hirotsugu Sugiura

TamaJP8 patents

6 Patents

US125710912026
Method for Forming Carbon Film and Film Forming Apparatus
ASM IP Holding B.V.
0 cites
US125687792026
Method of Forming Treated Silicon-carbon Material
ASM IP Holding B.V.
0 cites
US125060002025
Method of Filling Gap with Flowable Carbon Layer
ASM IP Holding B.V.
0 cites
US121257002024
Method of Forming High Aspect Ratio Features
ASM IP Holding B.V.
0 cites
US120681542024
Method of Forming a Nitrogen-containing Carbon Film and System for Performing the Method
ASM IP Holding B.V.
0 cites
US119938492024
Carbon Hard Mask, Film Forming Apparatus, and Film Forming Method
National University Corporation Tokai National Higher Education And Research System
0 cites