5 Patents
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- US124682212025Imprint Apparatus for Forming a Pattern of an Imprint Material on a Substrate-side Pattern Region of a Substrate by Using a Mold, and Related Device Manufacturing Methods
CANON KABUSHIKI KAISHA
0 cites - US124497272025Imprint Apparatus, Manufacturing Method for Article, and Computer Program
CANON KABUSHIKI KAISHA
0 cites - 0 cites