Patents/Inventors

Hiroshi Yakushiji

KanagawaJP3 patents

4 Patents

US126069042026
Film Forming Apparatus, Control Apparatus for Film Forming Appartus, and Film Forming Method
CANON ANELVA CORPORATION
0 cites
US124380752025
Method for Manufacturing a Laminated Body
CANON ANELVA CORPORATION
0 cites
US118107482023
Ion Gun and Vacuum Processing Apparatus
CANON ANELVA CORPORATION
0 cites
US116002952023
Vacuum Process Apparatus and Vacuum Process Method
CANON ANELVA CORPORATION
0 cites