Patents/Inventors

Hiroshi Tsujimoto

MiyagiJP4 patents

5 Patents

US123879142025
Upper Electrode Assembly
TOKYO ELECTRON LIMITED
0 cites
US123548412025
Substrate Processing Device, Substrate Processing System, Control Method for Substrate Processing Device, and Control Method for Substrate Processing System
Tokyo Electron Limited
0 cites
US122179422025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US116768002023
Substrate Processing Apparatus and Control Method of Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US115574982023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites