54 Patents
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- US122437292025Member for Semiconductor Manufacturing Apparatus and Method for Manufacturing the Same
NGK INSULATORS, Ltd.
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- US122388262025Semiconductor-manufacturing Apparatus Member and Method of Manufacturing the Same
NGK INSULATORS, Ltd.
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- US119515832024Electrostatic Chuck with High Insulation Performance and Electrostatic Attraction Force
NGK INSULATORS, Ltd.
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- US117840682023Member for Semiconductor Manufacturing Apparatus and Method for Manufacturing the Same
NGK INSULATORS, Ltd.
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