Patents/Inventors

Hiroshi Sone

TokyoJP2 patents

3 Patents

US123946562025
Mounting Table and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US123157072025
Mounting Table Structure, Substrate Processing Apparatus, and Method of Controlling Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US115519182023
Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites