Patents/Inventors

Hiroshi Nakajo

ToyamaJP2 patents

2 Patents

US125557522026
Substrate Processing Apparatus, Electrode Structure and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US121958532025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, Substrate Processing Method, and Recording Medium
Kokusai Electric Corporation
0 cites