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Inventors
Hiroshi Hanekawa
Fukushima
JP
9 patents
10 Patents
US12235575
2025
Reflective Mask Blank for EUV Lithography and Substrate with Conductive Film
AGC Inc.
0 cites
US12216398
2025
Reflective Mask Blank and Reflective Mask
AGC Inc.
0 cites
US12124164
2024
Reflective Mask Blank and Reflective Mask
AGC Inc.
0 cites
US12038685
2024
Reflective Mask Blank for EUV Lithography
AGC Inc.
0 cites
US12032280
2024
Reflective Mask Blank, Reflective Mask, and Method for Manufacturing Reflective Mask
AGC Inc.
0 cites
US11982935
2024
Reflective Mask Blank for EUV Lithography
AGC Inc.
0 cites
US11934093
2024
Reflective Mask Blank for EUV Lithography and Substrate with Conductive Film
AGC Inc.
0 cites
US11914283
2024
Reflective Mask Blank and Reflective Mask
AGC Inc.
0 cites
US11703751
2023
Reflective Mask Blank and Reflective Mask
AGC Inc.
0 cites
US11698580
2023
Reflective Mask Blank for EUV Lithography
AGC Inc.
0 cites