6 Patents
- US124244752025Ceramic Joined Body, Electrostatic Chuck Device, and Method for Producing Ceramic Joined Body
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites - US118482232023Electrostatic Chuck Device and Method for Producing Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites - US118429142023Composite Sintered Body, Electrostatic Chuck Member, and Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites - US118374892023Electrostatic Chuck Device and Production Method for Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites - US117840792023Composite Sintered Body, Electrostatic Chuck Member, and Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites - 0 cites