Hironobu Yabuta

4 Patents

• US123994372025

  Debris Mitigation Device and Light Source Apparatus Including the Same

  Ushio Denki Kabushiki Kaisha

  0 cites
• US123211072025

  Extreme Ultraviolet Light Source Device and Protection Method for Receiving Plate Member

  USHIO DENKI KABUSHIKI KAISHA

  0 cites
• US118222582023

  Foil Trap and Light Source Apparatus Including the Same

  Ushio Denki Kabushiki Kaisha

  0 cites
• US117748562023

  Extreme Ultraviolet Light Source Device

  USHIO DENKI KABUSHIKI KAISHA

  0 cites