Patents/Inventors

Hiromitsu Sakaue

YamanashiJP4 patents

3 Patents

US125123542025
Substrate Processing Apparatus and Substrate Processing Method
Tokyo Electron Limited
0 cites
US121425062024
Substrate Transfer Apparatus, Substrate Processing System and Substrate Processing Method
Tokyo Electron Limited
0 cites
US117768282023
Vacuum Processing Device
Tokyo Electron Limited
0 cites