Patents/Inventors

Hiromichi Yamakawa

TokyoJP2 patents

3 Patents

US124008892025
Defect Inspection Device
HITACHI HIGH-TECH CORPORATION
0 cites
US123665382025
Defect Inspection Apparatus and Defect Inspection Method
HITACHI HIGH-TECH CORPORATION
0 cites
US123456542025
Defect Inspection Device, Defect Inspection Method, and Adjustment Substrate
HITACHI HIGH-TECH CORPORATION
0 cites