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Inventors
Hiromi Okada
Toyama
JP
3 patents
4 Patents
US12497696
2025
Gas Supply Structure and Substrate Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites
US12135248
2024
Temperature Sensor
OHIZUMI MFG. CO., Ltd.
0 cites
US11986847
2024
Nozzle Installation Jig
KOKUSAI ELECTRIC CORPORATION
0 cites
US11633753
2023
Nozzle Installation Jig
KOKUSAI ELECTRIC CORPORATION
0 cites