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Inventors
Hiroki Nonaka
Joetsu
JP
2 patents
3 Patents
US12189292
2025
Negative Resist Composition and Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US12032287
2024
Resist Material and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US11994798
2024
Resist Material and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites