Patents/Inventors

Hiroki Maehara

YamanashiJP3 patents

4 Patents

US124865752025
Apparatus for Processing Substrate, Gas Shower Head, and Method for Processing Substrate
Tokyo Electron Limited
0 cites
US124009632025
Conductive Superlattice Structures and Methods of Forming the Same
TOKYO ELECTRON LIMITED
0 cites
US123364362025
Etching Method
Tokyo Electron Limited
0 cites
US116161942023
Etching Method
TOKYO ELECTRON LIMITED
0 cites