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Inventors
Hiroki Kawada
Tokyo
JP
2 patents
3 Patents
US12237145
2025
Charged Particle Beam Device and Inspection Device
HITACHI HIGH-TECH CORPORATION
0 cites
US11713963
2023
Pattern Shape Evaluation Device, Pattern Shape Evaluation System, and Pattern Shape Evaluation Method
HITACHI HIGH-TECH CORPORATION
0 cites
US11607667
2023
Absorption Agent and Absorbent Article
NIPPON SHOKUBAI CO., Ltd.
0 cites