Hiroki Hatta

4 Patents

• US125291372026

  Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

  Kokusai Electric Corporation

  0 cites
• US124354232025

  Substrate Processing Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US123593142025

  Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US117537162023

  Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, and Method of Manufacturing Semiconductor Device

  Kokusai Electric Corporation

  0 cites