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Inventors
Hirokazu Sakamoto
Koshi
JP
1 patent
2 Patents
US12032294
2024
Abnormality Detection Device of Chemical Solution, Liquid Processing Device, Substrate Processing Apparatus, Abnormality Detection Method of Chemical Solution, Liquid Processing Method, and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US11918889
2024
Device, for Example Video Game Device, Provided with a Contactless Transponder
STMICROELECTRONICS (ROUSSET) SAS
0 cites