Hirokazu Kyokane

2 Patents

• US125418372026

  Etching Processing System, Method of Predicting Etching Quality, and Non-transitory Storage Medium of Etching Quality Prediction Storing a Program Causing a Computer to Implement a Prediction

  Tokyo Electron Limited

  0 cites
• US124426352025

  Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium

  Tokyo Electron Limited

  0 cites