Hirohisa Yamazaki

7 Patents

• US124736482025

  Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US123548872025

  Cleaning Method, Method of Manufacturing Semiconductor Device, and Substrate Processing Apparatus

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US122345502025

  Vaporizer, Processing Apparatus and Method of Manufacturing Semiconductor Device

  Kokusai Electric Corporation

  0 cites
• US119707712024

  Vaporizer, Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US118735552024

  Vaporizer, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device

  Kokusai Electric Corporation

  0 cites
• US118668222024

  Vaporizer, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US115426032023

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Substrate Processing Method

  Kokusai Electric Corporation

  0 cites