Patents/Inventors

Hirofumi Morita

Setagaya-kuJP12 patents

10 Patents

US125923602026
Multi Charged Particle Beam Writing Method and Multi Charged Particle Beam Writing Apparatus
Nuflare Technology, Inc.
0 cites
US125801482026
Multi Charged Particle Beam Writing Apparatus
Nuflare Technology, Inc.
0 cites
US124068282025
Optical System Adjustment Method for Multi Charged Particle Beam Apparatus and Computer Readable Recording Medium
Nuflare Technology, Inc.
0 cites
US120091752024
Charged Particle Beam Writing Apparatus
Nuflare Technology, Inc.
0 cites
US119086592024
Multi Charged Particle Beam Writing Apparatus
Nuflare Technology, Inc.
0 cites
US118043602023
Multi Charged Particle Beam Adjustment Method, Multi Charged Particle Beam Irradiation Method, and Multi Charged Particle Beam Irradiation Apparatus
Nuflare Technology, Inc.
0 cites
US117843352023
Hydrogen-energy Control System and Control Method for Hydrogen-energy Control System
Toshiba Energy Systems & Solutions Corporation
0 cites
US117567662023
Charged Particle Beam Writing Apparatus and Charged Particle Beam Writing Method
Nuflare Technology, Inc.
0 cites
US117215202023
Semiconductor Device, Multi-charged-particle Beam Writing Apparatus, and Multi-charged-particle Beam Exposure Apparatus
Nuflare Technology, Inc.
0 cites
US117108392023
Controller, Controlling Method, and Record Medium
Toshiba Energy Systems & Solutions Corporation
0 cites