Hirofumi Kozakai

3 Patents

• US121354962024

  Reflective Mask Blank and Reflective Mask

  HOYA CORPORATION

  0 cites
• US118801302024

  Reflective Mask Blank, Reflective Mask and Method of Manufacturing Semiconductor Device

  HOYA CORPORATION

  0 cites
• US116504942023

  Substrate with a Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, and Semiconductor Device Manufacturing Method

  HOYA CORPORATION

  0 cites