Patents/Inventors

Hiroaki Chihaya

YamanashiJP8 patents

8 Patents

US125538452026
Holder Temperature Detection Method, Holder Monitoring Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US124697232025
Substrate Processing Apparatus and Abnormality Detection Method
Tokyo Electron Limited
0 cites
US123920262025
Method and Device for Substrate Processing
Tokyo Electron Limited
0 cites
US123879222025
Film Forming Apparatus, Processing Condition Determination Method, and Film Forming Method
TOKYO ELECTRON LIMITED
0 cites
US121702172024
Substrate Processing Apparatus and Abnormality Detection Method
Tokyo Electron Limited
0 cites
US119396652024
Film Thickness Measuring Apparatus and Film Thickness Measuring Method, and Film Forming System and Film Forming Method
TOKYO ELECTRON LIMTED
0 cites
US117156712023
Film Forming System, Magnetization Characteristic Measuring Device, and Film Forming Method
TOKYO ELECTRON LIMITED
0 cites
US115425922023
Film Forming System and Method for Forming Film on Substrate
TOKYO ELECTRON LIMITED
0 cites