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Inventors
Hiroaki Agawa
Yamanashi
JP
3 patents
3 Patents
US12354898
2025
Stage, Testing Apparatus, and Stage Operating Method
Tokyo Electron Limited
0 cites
US12075537
2024
Control Method of Inspection Apparatus and Inspection Apparatus
Tokyo Electron Limited
0 cites
US11768236
2023
Test Device Control Method and Test Device
Tokyo Electron Limited
0 cites