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Inventors
Hilko Dirk Bos
Utrecht
NL
1 patent
2 Patents
US12276921
2025
Substrate Comprising a Target Arrangement, and Associated at Least One Patterning Device, Lithographic Method and Metrology Method
ASML Netherlands B.V.
0 cites
US12105432
2024
Metrology Method and Associated Computer Product
ASML Netherlands B.V.
0 cites