Hikaru Kitayama

2 Patents

• US124179222025

  Surface Treatment Method, Dry Etching Method, Cleaning Method, Semiconductor Device Manufacturing Method, and Etching Device

  CENTRAL GLASS COMPANY, LIMITED

  0 cites
• US123082442025

  Dry Etching Method, Method for Producing Semiconductor Device, and Etching Device

  Central Glass Company, Limited

  0 cites