Patents/Inventors

Hikaru Kawarazaki

KyotoJP5 patents

4 Patents

US125753542026
Substrate Processing Method and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US125506652026
Temperature Measurement Method and Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US122196702025
Light-irradiation Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US115748242023
Heat Treatment Method Including Low Temperature Degassing Before Flash Lamp Anneal and Heat Treatment Apparatus Thereof
SCREEN HOLDINGS CO., Ltd.
0 cites