Patents/Inventors

Hidetoshi Mimura

ToyamaJP2 patents

3 Patents

US122031672025
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US118592802024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites
US116859922023
Substrate Processing Apparatus, Quartz Reaction Tube and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites