Patents/Inventors

Hidetoshi Hanaoka

MiyagiJP4 patents

4 Patents

US125867632026
Shower Head Electrode Assembly and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119231712024
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US117053082023
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US116641982023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites