Patents/Inventors

Hideto Saito

MiyagiJP2 patents

3 Patents

US124446352025
Substrate Support and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122760372025
Anodized Titanium Material and Method for Producing the Same
TOKYO ELECTRON LIMITED
0 cites
US116268182023
Substrate Processing Apparatus, and Temperature Control Method
TOKYO ELECTRON LIMITED
0 cites