Patents/Inventors

Hideto Nagashima

KanagawaJP3 patents

4 Patents

US121129292024
Cathode Unit for Magnetron Sputtering Apparatus and Magnetron Sputtering Apparatus
ULVAC, Inc.
0 cites
US119231782024
Vacuum Processing Apparatus
ULVAC, Inc.
0 cites
US116294002023
Sputtering Target and Method of Producing the Same
ULVAC, Inc.
0 cites
US115491732023
Sputtering Apparatus
ULVAC, Inc.
0 cites