Patents/Inventors

Hidetatsu Isokawa

TokyoJP1 patent

2 Patents

US121192462024
Method, Device, and Non-transitory Computer Readable Medium for Determining Timing of Removing Substrate from Cassette in Substrate Processing Device, and Substrate Processing Device
EBARA CORPORATION
0 cites
US115415022023
Substrate Processing Apparatus
EBARA CORPORATION
0 cites