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Inventors
Hidetaka Oshio
Tokyo
JP
2 patents
3 Patents
US12183578
2024
Method for Forming and Patterning a Layer And/or Substrate
Applied Materials, Inc.
0 cites
US12112949
2024
Highly Etch Selective Amorphous Carbon Film
Applied Materials, Inc.
0 cites
US12014927
2024
Highly Etch Selective Amorphous Carbon Film
Applied Materials, Inc.
0 cites