Patents/Inventors

Hideomi Hane

YamanashiJP3 patents

4 Patents

US124547572025
Heat Treatment Apparatus, Control Method, and Storage Medium
TOKYO ELECTRON LIMITED
0 cites
US120778552024
Cleaning Method and Film Deposition Apparatus
Tokyo Electron Limited
0 cites
US119707682024
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117252762023
Plasma Purge Method
Tokyo Electron Limited
0 cites