Patents/Inventors

Hideo Kaneko

JoetsuJP5 patents

6 Patents

US122653212025
Reflective Mask Blank, and Method for Manufacturing Reflective Mask
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US121817902024
Reflective Mask Blank and Reflective Mask
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US118605292024
Substrate with Multilayer Reflection Film for EUV Mask Blank, Manufacturing Method Thereof, and EUV Mask Blank
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US118358512023
Substrate with Multilayer Reflection Film for EUV Mask Blank, Manufacturing Method Thereof, and EUV Mask Blank
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US117748452023
Photomask Blank, and Manufacturing Method Thereof
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US116247122023
Substrate Defect Inspection Method and Substrate Defect Inspection Apparatus
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites