Patents/Inventors

Hideki Yuasa

YamanashiJP4 patents

4 Patents

US125675632026
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US121295442024
Cleaning Method and Plasma Treatment Device
TOKYO ELECTRON LIMITED
0 cites
US120778652024
Film Forming Method and Film Forming Apparatus
Tokyo Electron Limited
0 cites
US120606412024
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites