Hidehiko Sato

4 Patents

• US125418372026

  Etching Processing System, Method of Predicting Etching Quality, and Non-transitory Storage Medium of Etching Quality Prediction Storing a Program Causing a Computer to Implement a Prediction

  Tokyo Electron Limited

  0 cites
• US122886782025

  Substrate Processing Apparatus and Substrate Transfer Position Adjustment Method

  TOKYO ELECTRON LIMITED

  0 cites
• US122053042025

  Image Processing Apparatus, Image Processing Method and Computer-readable Medium

  SOCIONEXT Inc.

  0 cites
• US117053742023

  Substrate Processing Method and Substrate Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites