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Inventors
Hideaki Tanimura
Kyoto
JP
2 patents
3 Patents
US12283498
2025
Light Irradiation Type Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US12219670
2025
Light-irradiation Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US11574824
2023
Heat Treatment Method Including Low Temperature Degassing Before Flash Lamp Anneal and Heat Treatment Apparatus Thereof
SCREEN HOLDINGS CO., Ltd.
0 cites