3 Patents
- US124739042025Electrostatic Micro-pump and a Process to Produce an Electrostatic Micro-pump
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v.
0 cites - US122817242025Method for Manufacturing a Micromechanical Device and Micromechanical Valve
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.
0 cites - US116247412023Sensor Arrangement and Method for Sensing an Amount or a Concentration of a Target Fluid in a Medium with the Sensor Arrangement
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
0 cites