Henricus Johannes Lambertus Megens

2 Patents

• US120322992024

  Metrology Method and Associated Metrology and Lithographic Apparatuses

  ASML NETHERLANDS B.V.

  0 cites
• US119661662024

  Measurement Apparatus and a Method for Determining a Substrate Grid

  ASML NETHERLANDS B.V.

  0 cites