Patents/Inventors

Heiko Feldmann

AalenDE4 patents

5 Patents

US120401032024
Imaging Optical Arrangement to Image an Object Illuminated by X-rays
Carl Zeiss SMT GmbH
0 cites
US119472652024
Optical Diffraction Component
Carl Zeiss SMT GmbH
0 cites
US119143032024
Apparatus and Method for Characterizing a Microlithographic Mask
Carl Zeiss SMT GmbH
0 cites
US118676422024
Inspection Device for Masks for Semiconductor Lithography and Method
Carl Zeiss SMT GmbH
0 cites
US118172312023
Detection System for X-ray Inspection of an Object
Carl Zeiss X-ray Microscopy Inc.
0 cites